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Fundamentals of Microfabrication
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Fundamentals of Microfabrication is the first book to examine all aspects of the attempt to build functional devices at a molecular size. Ten chapters discuss in detail topics such as lithography, pattern transfer, wet and dry bulk micromachining, surface micromachining, and LIGA. Alternative micromachining technologies are described and electronics used with micromachined devices are examined. Bonding and packaging issues are defined. The book also presents quantum structures and reviews molecular engineering. Numerous appendices offer valuable information in an easily accessible format.
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Product details
Hardcover: 589 pages
Publisher: CRC-Press; 1 edition (February 1, 1998)
Language: English
ISBN-10: 9780849394515
ISBN-13: 978-0849394515
ASIN: 0849394511
Product Dimensions:
1.5 x 8.8 x 11.2 inches
Shipping Weight: 4.4 pounds (View shipping rates and policies)
Average Customer Review:
4.4 out of 5 stars
13 customer reviews
Amazon Best Sellers Rank:
#1,775,020 in Books (See Top 100 in Books)
This book is the single best resource anyone can have for microfabrication. It's incredibly thorough in the content that it covers and goes into great detail on not only what processes exist for MEMS fabrication but also HOW it's done, WHY it happens (the physics behind it), and even a history behind the processes. Even as thorough as it is, this book is still pretty easy to follow and requires little background knowledge on the subject.Definitely a must-have for anyone that will be working with MEMS or nanotechnology, even if as nothing more than a reference book.
The content is ok but I totally cannot understand why the publisher chose glassy paper. It's like a mirror or Ipad. My eyes feel very uncomfortable when reading it for even one minute!!
Pretty good distribution of the topics in the three volumes. Useful information about MEMS, NEMS and biomedical aplications. Pretty good paper quality of the book.
It covers a lot of material and has some good pictures, but definitions and equations are a little terse or confusing. The book is also heavy...
I got it like it was described and pretty soon, good deal!
good!! very useful to me!!!I want to recommend this product to my friends.the color is very great apparently.
Very good book.
Feynman noted that back in 1959. Nanotechnology, MEMS, microfluidics, labs on a chip, and NEMS have all gotten a lot of press more recently. This encyclopedic book remains the bible of manufacturing at the very small scale. I do not know of a replacement book yet, though some sections of this one are getting quite dated, especially, as noted in another review, the clean room section.
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